A message came that the domestic 28nm mask aligner will be delivered at the end of the year. Is ASML in a hurry？

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　　The United States, the Netherlands and Japan have reached a tripartite agreement to restrict the export of important semiconductor equipment such as mask aligner, and ASML needs a license to ship high-end mask aligner to the mainland. After so many years, ASML has not only failed to get a license, but also been expanded to limit the scope of shipment.

　　Under such circumstances, domestic mask aligner can only rely on itself. It is reported that domestic 28nm mask aligner will be delivered at the end of the year. Is ASML in a hurry?

　　Mask aligner is an important equipment for manufacturing micro-structures in integrated circuits. It uses optical projection technology to project the designed chip pattern onto photosensitive materials to form fine patterns and circuits. However, the research and development of mask aligner is very difficult, and it needs to have the characteristics of high resolution and high precision to meet the manufacturing requirements of micro-structures.

　　This requires R&D personnel to have profound professional knowledge and technology in optics, machinery, electronics and other fields. Not only that, but also the problems of light source power, photoresist selection and exposure time control need to be solved to improve manufacturing efficiency and quality.

　　Under numerous difficulties, only a few enterprises in the world have mastered the mass production capacity of mask aligner, namely ASML in the Netherlands, Canon and Nikon in Japan and Shanghai Microelectronics in China.

　　The strengths of these manufacturers are different. ASML is the only enterprise that can produce EUV mask aligner, and it also occupies 80% of DUV mask aligner market share, standing at the top of the pyramid of chip manufacturing industry. Japanese mask aligner manufacturers mainly provide low-end DUV mask aligner, which can also meet certain demand in China market.

　　Only the United States, Japan and the Netherlands reached an agreement to control the export of important semiconductor equipment such as mask aligner. In the future, mask aligner, where ASML can ship to the mainland, can only be old products, while mask aligner, which involves advanced processes, is severely blocked.

　　If you want to break the game, you have to look at Shanghai microelectronics. At present, Shanghai Microelectronics can achieve the stable mass production of 90nm mask aligner, which still has a certain gap with the advanced process that everyone expects.

　　But a news came that the 28nm mask aligner of Shanghai Microelectronics will be delivered at the end of the year. According to Xinhua News, Shanghai Microelectronics is committed to the research and development of 28nm immersion mask aligner, and it is expected to deliver the first domestic SSA/800-10W mask aligner by the end of 2023.

　　It is reported that this kind of submerged mask aligner uses ArF light source with the wavelength of 193nm, which belongs to the fourth generation mask aligner technology, only one generation away from the most advanced EUV mask aligner technology. It is not easy to develop to the fourth generation of mask aligner technology.

　　If Shanghai Microelectronics really delivers SSA/800-10W mask aligner before the end of the year, it may mean that the strength of Shanghai Microelectronics will surpass Canon and Nikon, which are Japanese established giants, and become mask aligner giants after ASML.

　　Although it is only 28nm, in fact, it can meet most of the chip manufacturing needs in the market. If you go through multiple exposure technology, you may be able to photoetch more advanced chip patterns. Of course, the specific performance depends on the actual application. At present, it is still in the news stage, and everything still needs to wait for the official announcement before the dust settles.

　　But what is certain is that Shanghai Microelectronics will keep moving forward, make greater process breakthroughs and live up to expectations.

　　Facing the progress of domestic mask aligner, is ASML in a hurry? In fact, ASML has long known that restricting blockade will accelerate the self-research in mask aligner, China, and the physical rules are the same in China. ASML has to worry. The delivery of domestic independent research and development in mask aligner means that domestic manufacturers are expected to reduce their dependence on ASML and improve their independent innovation ability and competitiveness.

　　ASML's monopoly position in the market may be impacted to some extent, resulting in a decrease in market share.

　　The delivery of 28nm mask aligner also shows that domestic technology companies have made great progress in development and innovation, and the demand for more flexible supply chain and technical support is also increasing. This will better meet the needs of the domestic market and avoid excessive dependence on imports.

　　ASML doesn't want to lose the Chinese mainland market. In the second quarter of this year, the mainland market contributed 24% of its revenue to ASML, second only to South Korea's 27%. In the first quarter, Chinese mainland's revenue share was only 8%, which shows that the development and growth of China market is very fast.

　　If we lose the China market, ASML will suffer unpredictable losses. Even if the old equipment can be shipped, but with domestic mask aligner as another big choice, can ASML still stabilize its position in the hearts of customers?

　　What's more, the United States and the Netherlands are in cahoots with each other and constantly revise the restriction rules, which will inevitably lead to customers' concerns. In order to reduce supply chain risks, it is normal to choose to cooperate with domestic manufacturers. China is about to usher in the delivery of the first 28nm mask aligner. At this moment, Chinese people have been waiting for a long time, and ASML is also watching.

　　Whether ASML is in a hurry or not, the result is doomed. Not only in mask aligner, domestic manufacturers are making breakthroughs in many semiconductor equipment sectors such as etchers, cleaning machines, ion implanters, wafer cutting machines, etc., which basically cover the 28nm process. It may not be a reality to open a complete 28nm domestic production line, so let us wait and see.

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